Automated Wet Chemical Processing Systems
![Model 3100](https://aptsystems.com/wp-content/uploads/2016/11/image_3100.jpg)
COMMON FEATURES
| SAFETY FEATURES
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FLEXIBILITY
| SIMPLICITY/RELIABILITY/ SERVICEABILITY
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Model 3145 | Easy-to-read, menu-driven software |
MODEL 3110 CLEANERApplications:– Organic Clean
– Particulate Clean
– Final Clean
– Spin Dry – Automatic Chamber Rinse before next substrate processed | MODEL 3140 DEVELOP, ETCH or STRIP SYSTEMApplications:– Spray Develop for Laser Exposed Positive Resist – Spray Etch of chrome – Resist Strip
– Automatic Chamber Rinse before next substrate processed | MODEL 3140 DEVELOP and ETCH SYSTEMDevelop/Etch Process:
– Automatic Chamber Rinse before next substrate processed |